Sentaurus Topography 3D

Sentaurus Topography 3D is an advanced 3D simulator for evaluating and optimizing critical topography-processing steps such as etching and deposition.

This module is a basic introduction to the features of Sentaurus Topography 3D.

Section	Time
1. Getting Started	10 minutes
2. Example: Material Deposition	20 minutes
3. Example: Material Etching	30 minutes
4. Working With the Rate Formula Module	1 hour
5. Particle Monte Carlo Reaction Modeling	30 minutes
6. Particle Monte Carlo Examples	1 hour
7. Create and Use Masks From Layout Files	15 minutes
8. Extract and Visualize Geometric and PMC Data	15 minutes
9. Plasma Simulation and Link to PMC	20 minutes