Sentaurus Process

Sentaurus Process is a complete and highly flexible multidimensional process modeling environment.

This module is a basic introduction to the features of Sentaurus Process.

Section	Time
1. Getting Started	15 minutes
2. One-Dimensional Process Simulation	45 minutes
3. Two-Dimensional Process Simulation	45 minutes
4. Defining Models and Specifying Parameters	30 minutes
5. Working With Custom Calibration Files	30 minutes
6. Working With Advanced Calibration	30 minutes
7. Custom Models With Alagator	45 minutes
8. Special Focus: Trench Etching	40 minutes
9. Special Focus: Meshing	15 minutes
10. Special Focus: Remeshing for Device Simulation	15 minutes
11. Special Focus: Three-Dimensional Examples	30 minutes
12. Special Focus: Kinetic Monte Carlo	45 minutes
13. Special Focus: Lattice Kinetic Monte Carlo	45 minutes
14. Special Focus: Using Mask Information From GDSII Files	30 minutes
15. Special Focus: SiC Process Simulation	40 minutes
16. Special Focus: AlGaN Process Simulation	35 minutes