+------------------------------------------------------------------+ | ** Self capacitances are calculated using non touching contacts. | | Capacitance calculation at touching contacts are not valid. | +------------------------------------------------------------------+ +------------------------+---------------+---------------+---------------+---------------+---------------+ | Capacitance (Farad) | | | | | | | Calculation (C)(V)=(Q) | Metal3.1 | Metal1 | Metal2 | Metal3.2 | Metal3.3 | | Metal3.1 | +6.0186e-16 | -4.4788e-16 | -9.7086e-17 | -4.9131e-17 | -7.7544e-18 | | Metal1 | -4.4788e-16 | **+8.9456e-16 | ############# | -2.7654e-16 | -1.7014e-16 | | Metal2 | -9.7086e-17 | ############# | **+1.4270e-15 | -6.5126e-16 | -6.7869e-16 | | Metal3.2 | -4.9131e-17 | -2.7654e-16 | -6.5126e-16 | +1.0023e-15 | -2.5378e-17 | | Metal3.3 | -7.7544e-18 | -1.7014e-16 | -6.7869e-16 | -2.5378e-17 | +8.8197e-16 | +------------------------+---------------+---------------+---------------+---------------+---------------+ +--------------------+--------------+--------------+--------------+--------------+--------------+ | Capacitance Matrix | | | | | | | (Farad) | Metal3.1 | Metal1 | Metal2 | Metal3.2 | Metal3.3 | | Metal3.1 | 6.0186e-16 | 4.4788e-16 | 9.7086e-17 | 4.9131e-17 | 7.7544e-18 | | Metal1 | 4.4788e-16 | **8.9456e-16 | ############ | 2.7654e-16 | 1.7014e-16 | | Metal2 | 9.7086e-17 | ############ | **1.4270e-15 | 6.5126e-16 | 6.7869e-16 | | Metal3.2 | 4.9131e-17 | 2.7654e-16 | 6.5126e-16 | 1.0023e-15 | 2.5378e-17 | | Metal3.3 | 7.7544e-18 | 1.7014e-16 | 6.7869e-16 | 2.5378e-17 | 8.8197e-16 | +--------------------+--------------+--------------+--------------+--------------+--------------+ +------------------------+----------+--------+--------------+ | SPICE Models for Total | | | | | Capacitance (F) | | | | | C_0_0 | Metal3.1 | others | 6.0186e-16 | | C_1_1 | Metal1 | others | 8.9456e-16 | | C_2_2 | Metal2 | others | 1.4270e-15 | | C_3_3 | Metal3.2 | others | 1.0023e-15 | | C_4_4 | Metal3.3 | others | 8.8197e-16 | +------------------------+----------+--------+--------------+ +-------------------------+----------+----------+--------------+ | SPICE Models for Entire | | | | | Capacitance Matrix (F) | | | | | C_0_1 | Metal3.1 | Metal1 | 4.4788e-16 | | C_0_2 | Metal3.1 | Metal2 | 9.7086e-17 | | C_0_3 | Metal3.1 | Metal3.2 | 4.9131e-17 | | C_0_4 | Metal3.1 | Metal3.3 | 7.7544e-18 | | C_1_2 | Metal1 | Metal2 | 0.0000e+00 | | C_1_3 | Metal1 | Metal3.2 | 2.7654e-16 | | C_1_4 | Metal1 | Metal3.3 | 1.7014e-16 | | C_2_3 | Metal2 | Metal3.2 | 6.5126e-16 | | C_2_4 | Metal2 | Metal3.3 | 6.7869e-16 | | C_3_4 | Metal3.2 | Metal3.3 | 2.5378e-17 | +-------------------------+----------+----------+--------------+